JPH01145126U - - Google Patents
Info
- Publication number
- JPH01145126U JPH01145126U JP4156588U JP4156588U JPH01145126U JP H01145126 U JPH01145126 U JP H01145126U JP 4156588 U JP4156588 U JP 4156588U JP 4156588 U JP4156588 U JP 4156588U JP H01145126 U JPH01145126 U JP H01145126U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- semiconductor manufacturing
- manufacturing equipment
- mesh
- gasify
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005587 bubbling Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4156588U JPH01145126U (en]) | 1988-03-29 | 1988-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4156588U JPH01145126U (en]) | 1988-03-29 | 1988-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01145126U true JPH01145126U (en]) | 1989-10-05 |
Family
ID=31268002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4156588U Pending JPH01145126U (en]) | 1988-03-29 | 1988-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01145126U (en]) |
-
1988
- 1988-03-29 JP JP4156588U patent/JPH01145126U/ja active Pending